SiCやGaN基板を扱う高耐圧工程の真空チャックと検査光学
Schlüsselwörter
semiconductor,
stage,
lens,
zip,
inspection,
operation,
clean room,
factory,
reflex,
grating,
vacuum,
motor,
sensor,
cable,
lighting,
luster,
macro,
textured,
quality control,
automation,
rig,
mechanism,
static,
looking-glass,
industry,
technology,
japan
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